{"id":2092,"date":"2026-08-17T00:58:09","date_gmt":"2026-08-16T16:58:09","guid":{"rendered":"https:\/\/www.baiantek.com\/?p=3"},"modified":"2026-08-17T01:25:57","modified_gmt":"2026-08-16T17:25:57","slug":"mems-optical-vacuum-gauge","status":"publish","type":"post","link":"https:\/\/www.baiantek.com\/?p=2092","title":{"rendered":"MEMS\u5149\u5b66\u771f\u7a7a\u8ba1"},"content":{"rendered":"<h2>\u4ea7\u54c1\u6982\u8ff0<\/h2>\n<p>BA-FPP-VG \u7cfb\u5217 MEMS \u5149\u5b66\u771f\u7a7a\u8ba1\u662f\u4f9d\u6258F-P \u6cd5\u5e03\u91cc-\u73c0\u7f57\u5e72\u6d89+ MEMS \u5fae\u52a0\u5de5\u6280\u672f\u5f00\u53d1\u7684\u9ad8\u7cbe\u5ea6\u7edd\u538b\u771f\u7a7a\u6d4b\u91cf\u8bbe\u5907\u3002MEMS\u5149\u5b66\u771f\u7a7a\u8ba1\u91c7\u7528\u5206\u4f53\u5f0f\u8bbe\u8ba1\u7406\u5ff5\u533a\u522b\u4e8e\u4f20\u7edf\u7535\u5b66\u771f\u7a7a\u8ba1\uff0c\u6d4b\u91cf\u4f20\u611f\u7aef\u65e0\u6e90\u5de5\u4f5c\uff0c\u5177\u5907\u672c\u5b89\u9632\u7206\u3001\u6297\u5e72\u6270\u80fd\u529b\u5f3a\u3001\u8010\u8150\u8680\u3001\u8010\u8f90\u7167\u3001\u6297\u5f3a\u632f\u52a8\u7b49\u6280\u672f\u4f18\u52bf\uff0c\u4e13\u95e8\u9762\u5411\u4f4e\u771f\u7a7a\u5de5\u51b5\u7cbe\u5bc6\u538b\u529b\u76d1\u6d4b\u3002<\/p>\n<p>\u6574\u5957\u7cfb\u7edf\u7531MEMS \u5149\u7ea4\u771f\u7a7a\u4f20\u611f\u5668+\u5168\u5149\u8c31\u5206\u6790\u4eea\u4e24\u90e8\u5206\u5149\u7535\u5206\u79bb\u7ec4\u6210\uff0c\u5355\u53f0\u5206\u6790\u4eea\u53ef\u6302\u8f7d\u591a\u8def\u4f20\u611f\u5668\uff0c\u5b9e\u73b0\u4e00\u8868\u591a\u70b9\u771f\u7a7a\u91c7\u96c6\uff0c\u4f20\u611f\u5668\u6574\u4f53\u5b89\u88c5\u65b9\u5f0f\u7075\u6d3b\uff0c\u5149\u7535\u5206\u79bb\uff0c\u4f20\u611f\u5668\u5c31\u8fd1\u5b89\u88c5\u3001\u65e0\u9700\u4f9b\u7535\u3001\u5149\u7ea4\u957f\u8ddd\u79bb\u4f20\u8f93\uff0c\u65e0\u7535\u78c1\u5e72\u6270\uff0c\u4fe1\u53f7\u5728\u8fdc\u7a0b\u96c6\u4e2d\u5904\u7406\u548c\u663e\u793a\u3002\u9002\u914d\u534a\u5bfc\u4f53\u3001\u5149\u4f0f\u3001\u6838\u80fd\u3001\u7535\u529b\u7b49\u9ad8\u4e25\u82db\u5de5\u4e1a\u573a\u666f\u3002<\/p>\n<h2>\u4ea7\u54c1\u5f62\u6001<\/h2>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1988 size-medium\" src=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig02-e1786900955660-300x159.png\" alt=\"\" width=\"300\" height=\"159\" srcset=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig02-e1786900955660-300x159.png 300w, https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig02-e1786900955660.png 545w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-1994\" src=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig08-300x258.png\" alt=\"\" width=\"300\" height=\"258\" srcset=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig08-300x258.png 300w, https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig08.png 764w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><figcaption>\u56fe1 MEMS\u5149\u5b66\u771f\u7a7a\u4f20\u611f\u5668\u4ea7\u54c1\u56fe<\/figcaption><\/figure>\n<h2>\u4f18\u52bf\u7279\u70b9<\/h2>\n<h4>\u25c6\u6d4b\u91cf\u7cbe\u5ea6\u4f18\u5f02\uff0c\u957f\u671f\u6027\u80fd\u7a33\u5b9a<\/h4>\n<ul>\n<li>\u25b8 \u6700\u9ad8\u7cbe\u5ea6 \u00b10.25% F.S\u3001\u5206\u8fa8\u73870.01%F.S\uff0c\u5168\u6e29\u533a\u7a33\u5b9a\u3001\u4f4e\u6f02\u79fb\u514d\u6821\u51c6\uff1b\u76f4\u6d4b\u4ecb\u8d28\uff0c\u6297\u6c14\u4f53\u7ec4\u5206\u5e72\u6270\u3002<\/li>\n<\/ul>\n<h4>\u25c6\u65e0\u6e90\u672c\u5b89\uff0c\u73af\u5883\u9002\u5e94\u6027\u5e7f<\/h4>\n<ul>\n<li>\u25b8 \u65e0\u6e90\u672c\u5b89\u9632\u7206\uff0c\u6297\u7535\u78c1\u5e72\u6270\uff1b316L\u4e0d\u9508\u94a2+\u9694\u79bb\u819c\u7247\uff0c\u8010\u5f3a\u8150\u8680\uff0c\u9002\u914d\u5404\u7c7b\u9ad8\u5371\u5de5\u827a\u5de5\u51b5\u3002<\/li>\n<\/ul>\n<h4>\u25c6\u53ef\u9760\u6027\u9ad8\uff0c\u5bbd\u6e29\u5de5\u51b5\u9002\u914d<\/h4>\n<ul>\n<li>\u25b8 \u6297\u632f\u3001\u6297 320kPa \u8fc7\u8f7d\uff0c\u5bbd\u6e29\u8865\u507f\u6291\u5236\u6e29\u6f02\uff0c\u6781\u7aef\u5de5\u51b5\u957f\u671f\u7a33\u5b9a\u3002<\/li>\n<\/ul>\n<h4>\u25c6\u52a8\u6001\u91c7\u96c6\uff0c\u77ac\u65f6\u54cd\u5e94\u7075\u654f<\/h4>\n<h4>\u25c6\u54cd\u5e94\uff1c100ms\u3001\u5feb\u901f\u54cd\u5e94\u5de5\u51b5\u53c2\u6570\u53d8\u5316\uff0c\u6ee1\u8db3\u52a8\u6001\u5de5\u827a\u76d1\u6d4b\u9700\u6c42<\/h4>\n<h4>\u25c6\u5149\u7ea4\u7ec4\u7f51\u4f20\u8f93\uff0c\u8fdc\u7a0b\u8fd0\u7ef4\u4fbf\u6377<\/h4>\n<ul>\n<li>\u25b8 \u5149\u7535\u5206\u79bb\u67b6\u6784\u5149\u7ea4\u4f20\u8f93\uff0c\u5355\u4e3b\u673a\u53ef\u591a\u8def\u540c\u6b65\u91c7\u96c6\uff0c\u94e0\u88c5\u5149\u7f06\u3001\u5e03\u7ebf\u7b80\u4fbf\u53ef\u9760\uff0c\u4fbf\u4e8e\u8fdc\u7a0b\u96c6\u4e2d\u6d4b\u63a7\u3002<\/li>\n<\/ul>\n<h4>\u25c6\u667a\u80fd\u8fd0\u7ef4\uff0c\u901a\u8baf\u534f\u8bae\u901a\u7528<\/h4>\n<ul>\n<li>\u25b8 \u517c\u5bb9\u591a\u7c7b\u5de5\u4e1a\u6807\u51c6\u901a\u8baf\u534f\u8bae\uff0c4mA\u201420mA\/\uff080\u201410\uff09V \u6a21\u62df\u91cf\uff0cTCP\/RTU-MODBUS \u6570\u5b57\u4ee5\u592a\u7f51\u901a\u8baf\uff0c\u5177\u5907\u826f\u597d\u7cfb\u7edf\u9002\u914d\u6027\u4e0e\u901a\u7528\u6027\u3002<\/li>\n<\/ul>\n<h4>\u25c6\u89c4\u683c\u914d\u7f6e\u9f50\u5168\uff0c\u5b9a\u5236\u80fd\u529b\u7a81\u51fa<\/h4>\n<ul>\n<li>\u25b8 \u8bbe\u5907\u91cf\u7a0b\u4e0e\u63a5\u53e3\u89c4\u683c\u4f53\u7cfb\u5b8c\u5907\uff0c\u91cf\u7a0b\u8986\u76d6 \uff080~1\uff09torr \u81f3\uff080~133.3\uff09kPa\uff0c\u591a\u79cd\u7ed3\u6784\u63a5\u53e3\uff1aM18 \u6807\u51c6\u3001KF16\/KF25 \u771f\u7a7a\u63a5\u5934\u53ef\u9009\u3002<\/li>\n<\/ul>\n<h2>\u5e94\u7528\u9886\u57df<\/h2>\n<ul>\n<li>\u534a\u5bfc\u4f53\u884c\u4e1a\uff1a\u523b\u8680\u3001\u8584\u819c\u6c89\u79ef\u3001\u79bb\u5b50\u6ce8\u5165\u3001\u771f\u7a7a\u8154\u4f53\u4f4e\u771f\u7a7a\u5728\u7ebf\u76d1\u6d4b\uff0c\u8010\u534a\u5bfc\u4f53\u8150\u8680\u6027\u5de5\u827a\u6c14\u4f53\uff0c\u907f\u514d\u7535\u78c1\u5e72\u6270\u5f71\u54cd\u6676\u5706\u5de5\u827a\uff1b<\/li>\n<li>\u5149\u4f0f\u884c\u4e1a\uff1a\u7845\u7247\u9540\u819c\u3001\u6269\u6563\u7089\u3001\u771f\u7a7a\u70e7\u7ed3\u3001\u8584\u819c\u5149\u4f0f\u751f\u4ea7\u7ebf\u771f\u7a7a\u95ed\u73af\u63a7\u5236\uff0c\u8010\u9ad8\u6e29\u3001\u6297\u8f66\u95f4\u8bbe\u5907\u632f\u52a8\uff1b<\/li>\n<li>\u6838\u80fd\u884c\u4e1a\uff1a\u771f\u7a7a\u7ba1\u8def\u3001\u8f90\u7167\u73af\u5883\u771f\u7a7a\u76d1\u6d4b\uff1b<\/li>\n<li>\u7535\u529b\u884c\u4e1a\uff1a\u53d8\u538b\u5668\u771f\u7a7a\u6ce8\u6cb9\u3001GIS \u771f\u7a7a\u68c0\u6f0f\u3001\u706b\u7535\u5382\u771f\u7a7a\u8131\u786b\u7ba1\u8def\uff0c\u5f3a\u7535\u78c1\u73af\u5883\u7a33\u5b9a\u6d4b\u91cf\uff1b<\/li>\n<li>\u901a\u7528\u5de5\u4e1a\u771f\u7a7a\u573a\u666f\uff1a\u771f\u7a7a\u9540\u819c\u3001\u771f\u7a7a\u70ed\u5904\u7406\u3001\u9502\u7535\u6c60\u771f\u7a7a\u6ce8\u6db2\u3001\u5316\u5de5\u9632\u7206\u771f\u7a7a\u53cd\u5e94\u91dc\u3001\u79d1\u7814\u5b9e\u9a8c\u5ba4\u4f4e\u771f\u7a7a\u6807\u5b9a\u3002<\/li>\n<\/ul>\n<h2>\u7cfb\u7edf\u6307\u6807<\/h2>\n<table class=\"wp-block-table\">\n<tbody>\n<tr>\n<th>\u5e8f\u53f7<\/th>\n<th>\u53c2\u6570<\/th>\n<th>\u6307\u6807<\/th>\n<\/tr>\n<tr>\n<td>1<\/td>\n<td>\u7c7b\u578b<\/td>\n<td>\u7edd\u538b<\/td>\n<\/tr>\n<tr>\n<td>2<\/td>\n<td>\u539f\u7406<\/td>\n<td>MEMS\u5149\u5b66\u5e72\u6d89<\/td>\n<\/tr>\n<tr>\n<td>3<\/td>\n<td>\u91cf\u7a0b<\/td>\n<td>1torr\u300110torr\u300120torr\u300150torr\u3001100torr\u30015kPa\u300110kPa\u300116kPa\u300120kPa\u300130kPa\u300140kPa\u3001133.3kPa(1000torr)<\/td>\n<\/tr>\n<tr>\n<td>4<\/td>\n<td>\u7cbe\u5ea6<\/td>\n<td>\u00b10.25%F.S\u3001\u00b10.5%F.S\u3001\u00b11%F.S<\/td>\n<\/tr>\n<tr>\n<td>5<\/td>\n<td>\u8d85\u538b\u6781\u9650<\/td>\n<td>320kPa<\/td>\n<\/tr>\n<tr>\n<td>6<\/td>\n<td>\u5c01\u88c5\u65b9\u5f0f<\/td>\n<td>316L \u4e0d\u9508\u94a2 + \u8010\u8150\u8680\u5408\u91d1<\/td>\n<\/tr>\n<tr>\n<td>7<\/td>\n<td>\u538b\u529b\u63a5\u53e3<\/td>\n<td>M18\u5185\u87ba\u7eb9\u63a5\u5934\u3001KF16\u3001KF25\u53ef\u9009<\/td>\n<\/tr>\n<tr>\n<td>8<\/td>\n<td>\u91c7\u96c6\u9891\u7387<\/td>\n<td>100Hz<\/td>\n<\/tr>\n<tr>\n<td>9<\/td>\n<td>\u5de5\u4f5c\u6e29\u5ea6<\/td>\n<td>\u771f\u7a7a\u4f20\u611f\u5668\uff1a-20\u2103\uff5e+85\u2103\uff1b&lt;br&gt;\u5206\u6790\u4eea\uff1a5\u2103\uff5e+55\u2103<\/td>\n<\/tr>\n<tr>\n<td>10<\/td>\n<td>\u50a8\u5b58\u6e29\u5ea6<\/td>\n<td>\u771f\u7a7a\u4f20\u611f\u5668\uff1a-20\u2103\uff5e+85\u2103\uff1b&lt;br&gt;\u5206\u6790\u4eea\uff1a-20\u2103\uff5e+55\u2103<\/td>\n<\/tr>\n<tr>\n<td>11<\/td>\n<td>\u4f9b\u7535\u7c7b\u578b<\/td>\n<td>\u989d\u5b9a\u7535\u538bDC 24V\uff0c\u529f\u80175W<\/td>\n<\/tr>\n<tr>\n<td>12<\/td>\n<td>\u5c3a\u5bf8<\/td>\n<td>\u771f\u7a7a\u4f20\u611f\u5668\uff1a\u957f\u5ea6\uff1a160\u00b15mm&lt;br&gt;\u5206\u6790\u4eea\uff1a\u957f\uff1a155\u00b12mm\uff0c\u5bbd\uff1a100\u00b12mm\uff0c\u9ad8\uff1a75\u00b12mm<\/td>\n<\/tr>\n<tr>\n<td>13<\/td>\n<td>\u91cd\u91cf<\/td>\n<td>\u771f\u7a7a\u4f20\u611f\u5668\uff1a430\u00b15g\uff1b\u5206\u6790\u4eea\uff1a890\u00b15g<\/td>\n<\/tr>\n<tr>\n<td>14<\/td>\n<td>\u5b89\u88c5\u65b9\u5f0f<\/td>\n<td>\u771f\u7a7a\u4f20\u611f\u5668\uff1aM18\u5185\u87ba\u7eb9\u63a5\u5934\u3001KF16\u3001KF25\u53ef\u9009&lt;br&gt;\u5206\u6790\u4eea\uff1a\u5bfc\u8f68\u5b89\u88c5<\/td>\n<\/tr>\n<tr>\n<td>15<\/td>\n<td>\u5149\u5b66\u63a5\u53e3<\/td>\n<td>3\/7\u901a\u9053\uff1aLC\/APC \u63a5\u53e3<\/td>\n<\/tr>\n<tr>\n<td>16<\/td>\n<td>\u54cd\u5e94\u65f6\u95f4<\/td>\n<td>\u2264100ms<\/td>\n<\/tr>\n<tr>\n<td>17<\/td>\n<td>\u8bbe\u8ba1\u5bff\u547d<\/td>\n<td>\u771f\u7a7a\u8ba1\u572825\u2103\u5178\u578b\u8fd0\u884c\u6761\u4ef6\u4e0b10\u5e74<\/td>\n<\/tr>\n<tr>\n<td>18<\/td>\n<td>\u8f6f\u4ef6\u529f\u80fd<\/td>\n<td>\u652f\u6301\u5149\u8c31\u663e\u793a\u3001\u6ce2\u957f\u6d4b\u91cf\u3001\u7269\u7406\u91cf\u6d4b\u91cf\u7b49\u591a\u79cd\u5de5\u4f5c\u6a21\u5f0f\uff0c\u652f\u6301\u6570\u636e\u3001\u66f2\u7ebf\u7b49\u663e\u793a\u65b9\u5f0f\uff0c\u5177\u6709\u5728\u7ebf\u81ea\u8bca\u65ad\u529f\u80fd<\/td>\n<\/tr>\n<tr>\n<td>19<\/td>\n<td>\u901a\u8baf\u63a5\u53e3<\/td>\n<td>\u6570\u5b57\u63a5\u53e3\uff1a\u4ee5\u592a\u7f51\u5bf9\u5916\u901a\u8baf\uff08\u6807\u51c6TCP-MODBUS\u534f\u8bae\uff09\u3001\u4e32\u53e3\u5bf9\u5916\u901a\u8baf\uff08\u6807\u51c6RTU-MODBUS\u534f\u8bae\uff09\uff1b\u6a21\u62df\u63a5\u53e3\uff1a\uff080\u201410\uff09V\u62164mA\u201420mA\u8f93\u51fa<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2>\u5c3a\u5bf8\uff1a<\/h2>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-1996\" src=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig10-300x194.png\" alt=\"\" width=\"300\" height=\"194\" srcset=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig10-300x194.png 300w, https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig10-768x496.png 768w, https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig10.png 1016w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><figcaption>\u56fe3 \u771f\u7a7a\u4f20\u611f\u5668<\/figcaption><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-1997\" src=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig11-300x197.png\" alt=\"\" width=\"300\" height=\"197\" srcset=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig11-300x197.png 300w, https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig11-768x505.png 768w, https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig11.png 933w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><figcaption>\u56fe4 \u5206\u6790\u4eea<\/figcaption><\/figure>\n<h2>\u7ec4\u7f51\u8bf4\u660e<\/h2>\n<p>\u4e00\u8868\u591a\u771f\u7a7a\u8ba1\u6216\u591a\u8868\u96c6\u7fa4<\/p>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-1998\" src=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig12-300x169.jpeg\" alt=\"\" width=\"300\" height=\"169\" srcset=\"https:\/\/www.baiantek.com\/wp-content\/uploads\/2026\/08\/mems-vacuum-gauge-fig12-300x169.jpeg 300w, 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