{"id":1467,"date":"2022-05-19T20:46:00","date_gmt":"2022-05-19T12:46:00","guid":{"rendered":"https:\/\/www.baiantek.com\/?p=1467"},"modified":"2022-05-19T20:46:00","modified_gmt":"2022-05-19T12:46:00","slug":"%e7%bb%86%e5%88%86%e9%a2%86%e5%9f%9f%e6%b7%b1%e8%80%95%e7%bb%86%e4%bd%9c%ef%bc%8c%e6%9c%ac%e5%9c%9f%e4%bc%a0%e6%84%9f%e5%99%a8%e5%8e%82%e5%95%86%e5%8f%91%e5%b1%95%e5%8f%af%e6%9c%9f","status":"publish","type":"post","link":"https:\/\/www.baiantek.com\/?p=1467","title":{"rendered":"\u7ec6\u5206\u9886\u57df\u6df1\u8015\u7ec6\u4f5c\uff0c\u672c\u571f\u4f20\u611f\u5668\u5382\u5546\u53d1\u5c55\u53ef\u671f"},"content":{"rendered":"
     <\/span> \u6211\u56fd\u5927\u529b\u53d1\u5c55\u6570\u5b57\u7ecf\u6d4e\uff0c\u63a8\u8fdb\u79d1\u6280\u81ea\u7acb\u81ea\u5f3a\uff0c\u4ee5\u521b\u65b0\u9a71\u52a8\u53d1\u5c55\uff0c\u56e0\u6b64\u82af\u7247\u56fd\u4ea7\u5316\u4e00\u76f4\u4ee5\u6765\u662f\u4e1a\u754c\u7684\u666e\u904d\u5171\u8bc6\u4e4b\u4e00\uff0c\u56fd\u5185\u6b63\u5728\u79ef\u6781\u53d1\u6325\u672c\u571f\u4ea7\u4e1a\u94fe\u4f18\u52bf\uff0c\u6709\u6548\u8854\u63a5\u5e02\u573a\u9700\u6c42\u3002\u4f20\u611f\u5668\u7c7b\u522b\u591a\uff0c\u5e94\u7528\u9886\u57df\u5e7f\u6cdb\uff0c\u5728\u7ec6\u5206\u9886\u57df\uff0c\u672c\u571f\u4f20\u611f\u5668\u5382\u5546\u5df2\u7ecf\u5f62\u6210\u5177\u6709\u7279\u8272\u7684\u4ea7\u54c1\u548c\u6280\u672f\u4f53\u7cfb\u3002\u6574\u4f53\u6765\u770b\uff0c\u4f20\u611f\u5668\u4ecd\u7136\u4ee5\u6c7d\u8f66\u7535\u5b50\u3001\u5de5\u4e1a\u3001\u901a\u4fe1\u3001\u6d88\u8d39\u7535\u5b50\u4e3a\u4e3b\u8981\u76ee\u6807\u5e02\u573a\uff0c\u540c\u65f6\u5728\u65b0\u80fd\u6e90\u3001\u8fd0\u8f93\u3001\u57ce\u5e02\u8bbe\u65bd\u7b49\u6838\u5fc3\u4ea7\u4e1a\u4e5f\u8574\u85cf\u7740\u8bb8\u591a\u673a\u4f1a\u3002<\/span><\/section>\n
      <\/span>\u4e0a\u6d77\u62dc\u5b89\u4f20\u611f\u6280\u672f\u6709\u9650\u516c\u53f8\u603b\u5de5\u517c\u98ce\u7535\u4e8b\u4e1a\u90e8\u603b\u7ecf\u7406\u738b\u65b0\u4e2d<\/span><\/strong><\/span>\u5e94\u9080\u672c\u671f\u300a\u6df1\u5ea6\u62a5\u9053\u300b\u91c7\u8bbf\uff0c\u56f4\u7ed5\u4f20\u611f\u5668\u4ea7\u4e1a\u7684\u73b0\u72b6\u3001\u6311\u6218\u548c\u524d\u666f\uff0c\u63a2\u8ba8\u5e76\u5206\u4eab\u4e86\u6240\u5904\u9886\u57df\u7684\u4f18\u52bf\u4ea7\u54c1\u548c\u6280\u672f\u8def\u7ebf\u3002\u4ee5\u4e0b\u4e3a\u91c7\u8bbf\u5185\u5bb9\u6c47\u7f16\u6574\u7406\uff1a<\/span><\/section>\n

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\u62dc\u5b89\u79d1\u6280\uff1a\u7b03\u5fd7\u5149\u7ea4 MEMS \u4f20\u611f\u6280\u672f\uff0c\u63a8\u52a8\u98ce\u529b\u3001\u50a8\u80fd\u3001\u8f68\u9053\u4ea4\u901a\u3001\u6c7d\u8f66\u7535\u5b50\u7b49\u5e94\u7528\u667a\u80fd\u5316<\/span><\/strong><\/span><\/section>\n
      <\/span>\u4f5c\u4e3a\u65b0\u6280\u672f\uff0c\u5f88\u591a\u884c\u4e1a\u7684\u6280\u672f\u4eba\u5458\u5149\u7ea4\u4f20\u611f\u5668\u7684\u8ba4\u77e5\u4e0d\u8db3\uff0c\u5ba2\u6237\u9762\u5bf9\u9009\u62e9\u65f6\u7ecf\u5e38\u4f1a\u56e0\u4e3a\u4e0d\u77e5\u9053\uff0c\u6216\u8005\u4e0d\u4e86\u89e3\uff0c\u800c\u5ffd\u7565\u4e86\u8fd9\u79cd\u76d1\u6d4b\u6280\u672f\u7684\u5e94\u7528\u3002\u6240\u4ee5\uff0c\u62dc\u5b89\u79d1\u6280\u52a0\u5f3a\u4e86\u6280\u672f\u63a8\u5e7f\u529b\u5ea6\uff0c\u53c2\u52a0\u4e86\u884c\u4e1a\u5c55\u4f1a\u548c\u91cd\u8981\u884c\u4e1a\u4f1a\u8bae\uff0c\u52a0\u5927\u5ba2\u6237\u4e00\u5bf9\u4e00\u7684\u6c9f\u901a\u80fd\u529b\u548c\u56e2\u961f\u670d\u52a1\u80fd\u529b\u3002<\/span><\/section>\n
      \u62dc\u5b89\u79d1\u6280\u7684\u6838\u5fc3\u8fd8\u662f\u4ee5\u5149\u7ea4 MEMS\u4f20\u611f\u6280\u672f\u7684\u7814\u53d1\u3001\u751f\u4ea7\u5de5\u827a\u548c\u751f\u4ea7\u80fd\u529b\u7684\u5efa\u8bbe\u4e3a\u57fa\u7840\uff0c\u8fdb\u884c\u884c\u4e1a\u521b\u65b0\u6027\u7684\u5e94\u7528\u5f00\u53d1\u4e0e\u5408\u4f5c\u3002\u5149\u7ea4 MEMS\u6280\u672f\u662f\u76ee\u524d\u4f20\u611f\u6280\u672f\u7684\u5148\u8fdb\u6280\u672f\uff0c\u5b83\u662f\u4ee5\u7845\u57fa\u4e3a\u57fa\u7840\uff0c\u5229\u7528\u5fae\u673a\u7535\uff08Micro Electro Mechanical System\uff09 \u52a0 \u5de5 \u5de5 \u827a \u628a \u529b\u5b66\u7ed3\u6784\u548c\u5149\u5b66\u7684\u5149\u8def\u8fdb\u884c\u7ed3\u5408\u53d1\u5c55\u51fa\u6765\u7684\u65b0\u578b\u7684\u4f20\u611f\u5668\u6280\u672f\u3002\u8fd9\u79cd\u6280\u672f\u7684\u7a81\u7834\u662f\u975e\u5e38\u6709\u4ef7\u503c\u7684\uff0c\u7845\u57fa\u7ed3\u6784\u53ef\u4ee5\u548c\u53ef\u89c1\u5149\u3001\u7ea2\u5916\u3001\u7d2b\u5916\u7b49\u591a\u79cd\u4e0d\u540c\u7c7b\u578b\u7684\u5149\u8fdb\u884c\u878d\u5408\uff0c\u53ef\u4ee5\u7814\u53d1\u6210\u5404\u79cd\u6d4b\u8bd5\u7c7b\u578b\u7684\u4f20\u611f\u5668\uff0c\u6bd4\u5982\u529b\u5b66\u7684\u4f20\u611f\u5668\u3001\u58f0\u97f3\u4f20\u611f\u5668\u3001\u6c14\u4f53\u4f20\u611f\u5668\u3001\u78c1\u4f20\u611f\u5668\u3001\u751f\u7269\u4f20\u611f\u5668\u7b49\u3002\u8fd9\u79cd\u4f20\u611f\u5668\u6280\u672f\u6ca1\u6709\u4efb\u4f55\u7535\u5b50\u5143\u5668\u4ef6\uff08\u6bd4\u5982\u7535\u5bb9\u3001\u7535\u963b\uff09\uff0c\u4e5f\u6ca1\u6709\u4efb\u4f55\u78c1\u6027\u5143\u5668\u4ef6\uff0c\u6240\u4ee5\u8fd9\u79cd\u4f20\u611f\u5668\u4e0d\u53d7\u7535\u548c\u78c1\u7684\u5e72\u6270\uff0c\u672c\u8eab\u4e0d\u9700\u8981\u4f9b\u7535\uff08\u65e0\u6e90\uff09\uff0c\u6784\u6210\u4e86\u4ee5\u7845\u57fa\u4e3a\u57fa\u7840\u3001\u4ee5\u5149\u4e3a\u4f20\u8f93\u4fe1\u53f7\u548c\u89e3\u8c03\u4fe1\u53f7\u7684\u65e0\u6e90\u4f20\u611f\u5668\u3002\u8fd9\u79cd\u4f20\u611f\u5668\u7684\u5bff\u547d\u975e\u5e38\u957f\uff08\u6ca1\u6709\u6613\u635f\u5668\u4ef6\uff09\u3001\u53ef\u9760\u6027\u9ad8\u3001\u4f53\u79ef\u5c0f\uff08\u4fbf\u4e8e\u690d\u5165\u7ed3\u6784\uff09\u3001\u6ca1\u6709\u7535\u78c1\u5e72\u6270\u3001\u4e0d\u6015\u6c34\u548c\u6cb9\u6c61\u3001\u9ad8\u4f4e\u6e29\u9002\u5e94\u6027\u5f3a\u3001\u6613\u7ec4\u7f51\u3001\u7cfb\u7edf\u517c\u5bb9\u6027\u5f3a\uff08\u80fd\u6d4b\u5230\u975e\u5e38\u591a\u7684\u7269\u7406\u91cf\uff09\u3002<\/span><\/section>\n
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\u56fe\u6ce8\uff1a<\/span>\u4e0a\u6d77\u62dc\u5b89\u4f20\u611f\u6280\u672f\u6709\u9650\u516c\u53f8\u603b\u5de5\u517c\u98ce\u7535\u4e8b\u4e1a\u90e8\u603b\u7ecf\u7406 <\/span>\u738b\u65b0\u4e2d<\/span><\/p>\n

     <\/span> \u62dc\u5b89\u79d1\u6280\u5229\u7528\u5149\u7ea4 MEMS \u6280\u672f\u5728\u5de5\u4e1a\u9886\u57df\u89e3\u51b3\u4e86\u5f88\u591a\u5361\u8116\u5b50\u6280\u672f\uff0c\u6bd4\u5982\u98ce\u529b\u98ce\u7535\u673a\u7684\u53f6\u7247\u8fd9\u79cd\u5927\u90e8\u4ef6\u7684\u76d1\u6d4b\uff0c\u7531\u4e8e\u98ce\u673a\u53f6\u7247\u6709\u9632\u96f7\u7684\u8981\u6c42\uff0c\u7535\u7684\u4f20\u611f\u5668\u5728\u53f6\u7247\u4e0a\u65e0\u6cd5\u5e03\u7f6e\uff0c\u65e0\u6cd5\u5bf9\u53f6\u7247\u8fdb\u884c\u5b9e\u65f6\u5168\u5bff\u547d\u5468\u671f\u76d1\u6d4b\uff0c\u6709\u4e86\u5149\u7ea4\u65e0\u6e90\u4f20\u611f\u5668\u540e\uff0c\u89e3\u51b3\u4e86\u957f\u671f\u53f6\u7247\u65e0\u6cd5\u76d1\u6d4b\u7684\u5c40\u9762\uff0c\u4e3a\u98ce\u673a\u53f6\u7247\u7684\u667a\u80fd\u5316\u548c\u65e0\u4eba\u5316\u8fd0\u7ef4\u63d0\u4f9b\u4e86\u6280\u672f\u4fdd\u969c\u3002\u6d77\u4e0a\u98ce\u7535\u7531\u4e8e\u5904\u4e8e\u6d77\u6d0b\u5de5\u7a0b\u73af\u5883\u4e0b\uff0c\u8150\u8680\u76d0\u96fe\u7b49\u6761\u4ef6\u82db\u523b\uff0c\u5854\u67b6\u4e0e\u57fa\u7840\u3001\u5347\u538b\u7ad9\u7684\u76d1\u6d4b\u4e2d\uff0c\u7535\u6d4b\u7684\u4f20\u611f\u5668\u90fd\u4e0d\u80fd\u5b9e\u73b0\u5168\u5bff\u547d\u5468\u671f\u7684\u76d1\u6d4b\uff0c\u5229\u7528\u5149\u7ea4 MEMS \u4f20\u611f\u5668\u6280\u672f\u5c31\u53ef\u4ee5\u5b9e\u73b0\u6d77\u4e0a\u98ce\u673a\u5927\u90e8\u4ef6\u7684\u5168\u5bff\u547d\u5468\u671f\u76d1\u6d4b\uff0c\u5c31\u80fd\u628a\u73b0\u6709\u6d77\u4e0a\u98ce\u529b\u53d1\u7535\u673a\u7684\u76d1\u6d4b\u6c34\u5e73\u63d0\u5347\u5230\u4e00\u4e2a\u65b0\u7684\u9ad8\u5ea6\uff0c\u53ef\u4ee5\u5feb\u901f\u63a8\u8fdb\u667a\u80fd\u5316\u98ce\u573a\u7684\u6280\u672f\u6c34\u5e73\u3002<\/span><\/section>\n
      \u8f68\u9053\u4ea4\u901a\u4e2d\u53d7\u7535\u5f13\u7684\u76d1\u6d4b\u4e5f\u662f\u4e00\u6837\uff0c\u53ea\u6709\u5149\u7ea4 MEMS \u6280\u672f\u624d\u53ef\u4ee5\u505a\u5230\u8f83\u597d\u7684\u53d7\u7535\u5f13\u7684\u63a5\u89e6\u529b\u76d1\u6d4b\u548c\u786c\u70b9\u51b2\u51fb\u76d1\u6d4b\uff0c\u8fd9\u4e9b\u4f20\u611f\u5668\u6280\u672f\u5e26\u6765\u7684\u7a81\u7834\uff0c\u63a8\u52a8\u884c\u4e1a\u5e94\u7528\u3002\u62dc\u5b89\u79d1\u6280\u76ee\u524d\u5728\u5de5\u4e1a\u9886\u57df\u7684\u5e94\u7528\u90fd\u662f\u6839\u636e\u884c\u4e1a\u7684\u9700\u6c42\uff0c\u8fdb\u884c\u5e95\u5c42\u6280\u672f\u7814\u53d1\uff0c\u5728\u6280\u672f\u7a81\u7834\u540e\u628a\u73b0\u6709\u7684\u667a\u80fd\u5316\u6c34\u5e73\u63a8\u8fdb\u5230\u4e00\u4e2a\u65b0\u7684\u6c34\u5e73\uff0c\u5b9e\u73b0\u7684\u90fd\u662f 0 \u5230 1 \u7684\u5f00\u521b\u6027\u7684\u5e94\u7528\u3002\u6211\u4eec\u73b0\u5728\u6b63\u5728\u505a\u7684\u662f\u5728\u51e0\u4e2a\u9886\u57df\u5185\u5b9e\u73b0\u5de5\u4e1a\u89c4\u6a21\u53d1\u5c55\u3002<\/span><\/section>\n
      \u540c\u6837\uff0c\u5728\u6c7d\u8f66\u7535\u5b50\u9886\u57df\uff0c\u62dc\u5b89\u79d1\u6280\u53ef\u4ee5\u5229\u7528\u5149\u7ea4 MEMS \u4f20\u611f\u5668\u65e0\u6e90\u3001\u6613\u690d\u5165\u7684\u7279\u70b9\uff0c\u5728\u65b0\u80fd\u6e90\u6c7d\u8f66\u7684\u7535\u6c60\u5b89\u5168\u76d1\u6d4b\u548c\u667a\u80fd\u5ea7\u8231\u4e2d\u505a\u4e00\u4e9b\u72ec\u7279\u7684\u5e94\u7528\uff0c\u516c\u53f8\u5df2\u7ecf\u5728\u9884\u7814\u8fd9\u4e2a\u65b9\u9762\u7684\u5e94\u7528\uff0c\u5728\u5408\u9002\u65f6\u673a\u4f1a\u63a8\u5411\u5e02\u573a\u3002<\/span><\/section>\n
      \u6d88\u8d39\u7535\u5b50\u9886\u57df\u516c\u53f8\u6709\u957f\u8fdc\u7684\u89c4\u5212\uff0c\u4f46\u73b0\u5728\u516c\u53f8\u7684\u4f53\u91cf\u4e0e\u5236\u9020\u80fd\u529b\u8fd8\u4e0d\u8db3\u4ee5\u6ee1\u8db3\u6d88\u8d39\u7535\u5b50\u91cf\u7ea7\u7684\u751f\u4ea7\u548c\u4ea4\u4ed8\u3002\u6240\u4ee5\uff0c\u5728\u6211\u4eec\u62dc\u5b89\u5fae\u7535\u5b50\u5efa\u8bbe\u5e76\u8fbe\u5230\u76f8\u5e94\u7684\u751f\u4ea7\u548c\u4ea4\u4ed8\u80fd\u529b\u540e\uff0c\u4f1a\u63a8\u51fa\u6211\u4eec\u5728\u6d88\u8d39\u7535\u5b50\u9886\u57df\u7684\u5e94\u7528\u4ea7\u54c1\uff0c\u540c\u65f6\uff0c\u516c\u53f8\u7684\u4f53\u91cf\u4e5f\u4f1a\u6bd4\u73b0\u5728\u6709\u4e00\u4e2a\u5927\u63d0\u5347\uff0c\u7b26\u5408\u6d88\u8d39\u7535\u5b50\u4f01\u4e1a\u91cf\u7ea7\u7684\u6c34\u5e73\uff0c\u6211\u4eec\u63a8\u51fa\u7684\u4ea7\u54c1\u4e5f\u4f1a\u6ee1\u8db3\u521b\u65b0\u6027\u5f88\u5f3a\u7684\u5e94\u7528\u9700\u6c42\u3002<\/span><\/section>\n
      \u5728\u8fd9\u4e9b\u9886\u57df\u7684\u53d1\u5c55\u9762\u4e34\u7684\u4e3b\u8981\u6311\u6218\u662f\u884c\u4e1a\u7684\u5feb\u901f\u53d1\u5c55\u548c\u4eba\u624d\u7684\u57f9\u517b\u4e4b\u95f4\u7684\u51b2\u7a81\u3002\u521b\u65b0\u6027\u5f88\u5f3a\u7684\u4f53\u7cfb\uff0c\u5b66\u79d1\u4ea4\u53c9\u975e\u5e38\u591a\uff0c\u9700\u8981\u4e00\u5b9a\u7684\u65f6\u95f4\u624d\u80fd\u57f9\u517b\u51fa\u9002\u5e94\u516c\u53f8\u53d1\u5c55\u7684\u4eba\u624d\u3002\u6240\u4ee5\uff0c\u62dc\u5b89\u79d1\u6280\u8fd8\u9700\u8981\u66f4\u5927\u529b\u5ea6\u5730\u52a0\u5927\u4eba\u624d\u57f9\u517b\u548c\u56e2\u961f\u5efa\u8bbe\u3002\u540c\u65f6\u6b22\u8fce\u793e\u4f1a\u5404\u7c7b\u4eba\u624d\u80fd\u52a0\u5165\u5230\u62dc\u5b89\uff0c\u5927\u5c55\u5b8f\u56fe\u3002<\/span><\/section>\n
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